For Intelligent Material Technologies
Business Areas
01
Precursor
  • Business Overview
  • Precursor is an organometallic compound designed to be used for thin film deposition for
    microcircuits of semiconductors in ALD and CVD processes
  • LPN provides various types of Precursors according to the needs of customers.
Product
Main Products
  • Zr Precursor
    • Used in Semi-con DRAM Capacitor
    • ALD ZrO2 Thin Film Deposition
  • Hf Precursor
    • Used in Semi-con DRAM Capacitor
    • ALD HfO2 Thin Film Deposition
  • Ti Precursor
    • Used in Semi-con DRAM Capacitor
    • ALD Leakage current protecting layer
  • Cu Precursor
    • Used in Micro LED, CIGS, Solar Cell
  • Ni Precursor
    • Used in Micro LED, CIGS, Solar Cell